Ultraprecision Mechatronics
Components with overall mechatronic system
For all industries
Ultra precision
Mechatronics
Ultra-precision in motion – precision bearings, ultra-precision drives, actuators, deformable mirrors. We not only manufacture your components, but also assemble them into an overall mechatronic system. Here, too, we are ideally positioned for medium to large quantities.
Whether polygon scanners for measurement technology, actuators for semiconductor technology or adjustable optics – our ultra-precision and clean room assembly capacities are constantly being expanded and “readjusted” to meet customer requirements. Our specialists repeatedly define reliable processes.
- Actuators for the semiconductor industry
- Polygon scanners for medical and environmental technology
- Adjustable mirrors for high-power lasers
high precision surface quality
resources
Actuator for
moving the wafer
Actuator for moving the wafer
The focus is on Kugler ultra-precision components, these are assembled with magnets, coils, temperature sensors, encoders. In the end, you get compact linear actuators based on air bearings or with flexible joints.
Application: The movement of wafers in a wafer stepper, the positioning of the entire wafer table. Submicrometer tolerances are understood, the highest level of particle freedom is guaranteed! Here, too, we offer our service for a wide variety of quantities – depending on customer needs.
Spindles for
polygon scanners
Spindles for polygon scanners
Sorting, measuring or processing – our polygon scanners HSPP, provided with the correct polygon, become the ideal component in our customers’ systems. As with a linear actuator, the heart is the bearing unit, equipped with motors, encoders and other sensors.
Here the action is a rotary movement and the mounted scanning mirror rotates with it. Our customers use hundreds of such “polygon scanners” every year to sort food or to monitor the recycling of packaging components!
Adaptive
mirrors
Adaptive mirrors
The laser does not hit correctly – our adaptive mirrors “help”: Wherever powerful multi-kilowatt lasers are used, our mirrors are used to compensate for heat-related effects, to compensate beam paths and to dynamically optimise machining processes.
Pneumatically driven, electrically controlled. The same applies here: We not only manufacture our “own” adaptive mirrors, we also manufacture, process, assemble and validate according to customer specifications!
Our
Experience / Expertise
More than 35 years of ultra-precision mechanical engineering – Kugler knows how to drive, control and measure axes, Kugler knows which process parameters are important in mechatronic systems. Only jitter-free movement ensures low noise in the application, only a precise positioning of the actuators enables high levels of accuracy later in operation.
Experience paired with extensive optical, mechanical and electronic measuring equipment, the latest tools for the process-reliable implementation of the manufacturing and assembly steps – all of this means that we can support our customers in the best possible and cost-effective way in implementing their requirements in the field of ultra-precision mechatronics.