Mechatronics
Ultraprecision,
that moves
Precision bearings, ultra-precise drives, actuators,
and deformable mirrors for all industries.
We manufacture and assemble complete mechatronic systems – ideal for medium to large quantities. Whether polygon scanners, actuators for semiconductor technology or adjustable optics – our clean room assembly capacities are continuously optimized to meet customer requirements. Our specialists ensure reliable processes.
Target group
Semiconductor industry
Our ultra-precise mechatronic components pave the way for state-of-the-art chip manufacturing processes.
Medical technology
Our ultra-precise systems promote groundbreaking advances in medical technology - from diagnostics to surgery.
Laser technology
Our ultra-precise aspherical mirrors and free-form optics enable maximum accuracy in complex laser applications.
Our
solutions
Actuator for
moving the wafer
The focus is on Kugler ultra-precision components, these are assembled with magnets, coils, temperature sensors, encoders. In the end, you get compact linear actuators based on air bearings or with flexible joints.
Application:
The movement of wafers in a wafer stepper, the positioning of the entire wafer table. Submicrometer tolerances are understood, the highest level of particle freedom is guaranteed! Here, too, we offer our service for a wide variety of quantities – depending on customer needs.
Spindles for
polygon scanners
Sorting, measuring or processing – our polygon scanners HSPP, provided with the correct polygon, become the ideal component in our customers’ systems. As with a linear actuator, the heart is the bearing unit, equipped with motors, encoders and other sensors.
Here the action is a rotary movement and the mounted scanning mirror rotates with it. Our customers use hundreds of such “polygon scanners” every year to sort food or to monitor the recycling of packaging components!
Adaptive mirrors
The laser does not hit correctly – our adaptive mirrors “help”: Wherever powerful multi-kilowatt lasers are used, our mirrors are used to compensate for heat-related effects, to compensate beam paths and to dynamically optimise machining processes.
Pneumatically driven, electrically controlled. The same applies here: We not only manufacture our “own” adaptive mirrors, we also manufacture, process, assemble and validate according to customer specifications!




Experience &
Expertise
Kugler started with interferometers – well proven and highly renowned, high-precision measuring equipment for the optical industry as well as for the semiconductor industry. The devices were not limited to the purely optical and metrological part, but also featured high precision mechanical stages for workpiece movement and positioning – that was certainly a unique selling point 30 years ago.
Today we enable our customers to use mechanical high precision to ensure the functionality of their products, to save costs (e.g. through reduced alignment effort), to build more precise devices – in essence to become better!